The 3300 series is the fastest high resolution wafer inspection system available. With greater than 3x throughput and 2x pixel sensitivity improvements, the 3300 provides process and tool monitoring for the 45nm node and beyond. Its latest Step&Image acquisition system, now with eight pixel sizes, uniquely extends the 3300 production sensitivity for critical FEOL layers AND throughput of 40 WPH for high speed tool monitoring.
See improvements over 31/3200  »

Configurable Models to Meet Your CoO Needs

3320

»  Fastest Tool Monitor

»  Lowest CoO

3370

»  Fastest Process Monitor

»  High Speed Plus

»  High Sensitivity

»  All DOI Types


Key Applications

»  Active Area Poly Deposition

»  STI ADI

»  STI Oxide Etch

»  Sacrificial Oxide Etch

»  WSix Deposition

»  Bit-Line CMP

»  Contact CMP

»  Cu CMP

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