Configurable Models to
Meet Your CoO Needs 3320
» Fastest Tool Monitor
» Lowest CoO 3370
» Fastest Process Monitor
» High Speed Plus
» High Sensitivity
» All DOI Types
Key Applications
» Active Area Poly Deposition
» STI ADI
» STI Oxide Etch
» Sacrificial Oxide Etch
» WSix Deposition
» Bit-Line CMP
» Contact CMP
» Cu CMP